Inventor
TABE YUTAKA
JP9 patents
⚠️ This page may combine multiple inventors who share the name “TABE YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
5 patentsUS7138629B2Nov 21, 2006
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP151 citations99
US7741601B2Jun 22, 2010
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP36 citations96
US7365324B2Apr 29, 2008
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP49 citations96
US8946631B2Feb 3, 2015
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP11 citations92
US9406480B2Aug 2, 2016
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP3 citations84