Inventor

TOHYAMA KEIICHI

JP9 patents

⚠️ This page may combine multiple inventors who share the name “TOHYAMA KEIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

8 patents

US7138629B2Nov 21, 2006

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP151 citations99

US5672091ASep 30, 1997

Polishing apparatus having endpoint detection device

EBARA CORP212 citations98

US7741601B2Jun 22, 2010

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP36 citations96

US7365324B2Apr 29, 2008

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP49 citations96

US8946631B2Feb 3, 2015

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP11 citations92

US9406480B2Aug 2, 2016

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP3 citations84

US7176459B2Feb 13, 2007

Electron beam apparatus

EBARA CORP7 citations74

US7403279B2Jul 22, 2008

Information recording medium examining apparatus and method

EBARA CORP5 citations62

NOJI NOBUHARU

1 patent

US8742341B2Jun 3, 2014

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

NOJI NOBUHARU4 citations82