Inventor
ICHIHASHI KAZUAKI
JP9 patents
Patents
9 patentsUS5804033ASep 8, 1998
Microwave plasma processing method and apparatus
HITACHI LTD32 citations92
US5520771AMay 28, 1996
Microwave plasma processing apparatus
HITACHI LTD28 citations92
US5259735ANov 9, 1993
Evacuation system and method therefor
HITACHI LTD45 citations92
US4810473AMar 7, 1989
Molecular beam epitaxy apparatus
HITACHI LTD24 citations92
US5914051AJun 22, 1999
Microwave plasma processing method and apparatus
HITACHI LTD10 citations73
US5785807AJul 28, 1998
Microwave plasma processing method and apparatus
HITACHI LTD11 citations73
US4699554AOct 13, 1987
Vacuum processing apparatus
HITACHI LTD17 citations72
US4203841AMay 20, 1980
Apparatus for high-efficient microbiological oxidation treatment
HITACHI LTD19 citations71
US4718681AJan 12, 1988
Sample chucking apparatus
HITACHI LTD11 citations70