Inventor
NAWATA MAKOTO
JP19 patents
⚠️ This page may combine multiple inventors who share the name “NAWATA MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
16 patentsUS5276386AJan 4, 1994
Microwave plasma generating method and apparatus
HITACHI LTD66 citations96
US5556714ASep 17, 1996
Method of treating samples
HITACHI LTD68 citations95
US5380397AJan 10, 1995
Method of treating samples
HITACHI LTD35 citations95
US4631106ADec 23, 1986
Plasma processor
HITACHI LTD99 citations94
US5804033ASep 8, 1998
Microwave plasma processing method and apparatus
HITACHI LTD32 citations92
US5520771AMay 28, 1996
Microwave plasma processing apparatus
HITACHI LTD28 citations92
US4618398AOct 21, 1986
Dry etching method
HITACHI LTD36 citations91
US5647944AJul 15, 1997
Microwave plasma treatment apparatus
HITACHI LTD21 citations88
US6328845B1Dec 11, 2001
Plasma-processing method and an apparatus for carrying out the same
HITACHI LTD8 citations73
US6329298B1Dec 11, 2001
Apparatus for treating samples
HITACHI LTD8 citations73
US5914051AJun 22, 1999
Microwave plasma processing method and apparatus
HITACHI LTD10 citations73
US5785807AJul 28, 1998
Microwave plasma processing method and apparatus
HITACHI LTD11 citations73
US4971651ANov 20, 1990
Microwave plasma processing method and apparatus
HITACHI LTD15 citations72
US4530708AJul 23, 1985
Air separation method and apparatus therefor
HITACHI LTD11 citations72
US6444087B2Sep 3, 2002
Plasma etching system
HITACHI LTD3 citations62
US4459143AJul 10, 1984
Temperature control method for reversing type heat exchanger group of air separation system
HITACHI LTD5 citations61