P

Inventor

FURUKAWA TAKAMITSU

JP8 patents
⚠️ This page may combine multiple inventors who share the name “FURUKAWA TAKAMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OKI ELECTRIC IND CO LTD

4 patents
US6511794B1Jan 28, 2003

Method of forming resist pattern, and exposure device

OKI ELECTRIC IND CO LTD19 citations89
US6455438B1Sep 24, 2002

Fabrication method for a semiconductor device

OKI ELECTRIC IND CO LTD14 citations80
US6838643B2Jan 4, 2005

Method and apparatus for performing baking treatment to semiconductor wafer

OKI ELECTRIC IND CO LTD5 citations59
US6956641B2Oct 18, 2005

Method of forming resist pattern, and exposure device

OKI ELECTRIC IND CO LTD0 citations49

LAPIS SEMICONDUCTOR CO LTD

2 patents
US12191343B2Jan 7, 2025

Semiconductor device and method of manufacturing semiconductor device

LAPIS SEMICONDUCTOR CO LTD0 citations59
US11610962B2Mar 21, 2023

Semiconductor device and method of manufacturing semiconductor device

LAPIS SEMICONDUCTOR CO LTD0 citations59

OKI SEMICONDUCTOR CO LTD

2 patents
US7771897B2Aug 10, 2010

Photomask for forming a resist pattern and manufacturing method thereof, and resist-pattern forming method using the photomask

OKI SEMICONDUCTOR CO LTD1 citations49
US7972752B2Jul 5, 2011

Photomask and method for forming a resist pattern

OKI SEMICONDUCTOR CO LTD0 citations38