Inventor
ONISHI KENSAKU
JP2 patents
Patents
2 patentsUS8827621B2Sep 9, 2014
Substrate processing apparatus, storage device, and method of transporting substrate storing container
INAGAKI YUKIHIKO9 citations80
US9728434B2Aug 8, 2017
Substrate processing apparatus, storage device, and method of transporting substrate storing container
INAGAKI YUKIHIKO4 citations69