Inventor
HSIEH WEN-KUO
TW14 patents
⚠️ This page may combine multiple inventors who share the name “HSIEH WEN-KUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
10 patentsUS9754818B2Sep 5, 2017
Via patterning using multiple photo multiple etch
TAIWAN SEMICONDUCTOR MFG CO LTD472 citations98
US9123656B1Sep 1, 2015
Organosilicate polymer mandrel for self-aligned double patterning process
TAIWAN SEMICONDUCTOR MFG CO LTD45 citations94
US9412648B1Aug 9, 2016
Via patterning using multiple photo multiple etch
TAIWAN SEMICONDUCTOR MFG CO LTD13 citations92
US10510584B2Dec 17, 2019
Via patterning using multiple photo multiple etch
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10340178B2Jul 2, 2019
Via patterning using multiple photo multiple etch
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9728445B2Aug 8, 2017
Method for forming conducting via and damascene structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10141220B2Nov 27, 2018
Via patterning using multiple photo multiple etch
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11018021B2May 25, 2021
Curing photo resist for improving etching selectivity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11798943B2Oct 24, 2023
Transistor source/drain contacts and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10347505B2Jul 9, 2019
Curing photo resist for improving etching selectivity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48