Inventor
USHIKUBO MAHO
JP6 patents
Patents
6 patentsUS5998819ADec 7, 1999
Thin ferroelectric film element having a multi-layered thin ferroelectric film and method for manufacturing the same
SHARP KK50 citations96
US5851841ADec 22, 1998
Method for producing ferroelectric film element, and ferroelectric film element and ferroelectric memory element produced by the method
SHARP KK30 citations92
US5831299ANov 3, 1998
Thin ferroelectric film element having a multi-layered thin ferroelectric film and method for manufacturing the same
SHARP KK35 citations92
US6162293ADec 19, 2000
Method for manufacturing ferroelectric thin film, substrate covered with ferroelectric thin film, and capacitor
SHARP KK26 citations91
US5548475AAug 20, 1996
Dielectric thin film device
SHARP KK37 citations91
US6197600B1Mar 6, 2001
Ferroelectric thin film, manufacturing method thereof and device incorporating the same
SHARP KK15 citations83