Inventor
CHEN CHIA-HO
TW16 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHIA-HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS9741575B2Aug 22, 2017
CVD apparatus with gas delivery ring
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9543125B2Jan 10, 2017
Directing plasma distribution in plasma-enhanced chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US9478480B2Oct 25, 2016
Alignment mark and method of formation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11923304B2Mar 5, 2024
Electro-migration barrier for interconnect
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11515255B2Nov 29, 2022
Electro-migration barrier for interconnect
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US9490209B2Nov 8, 2016
Electro-migration barrier for Cu interconnect
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US10867920B2Dec 15, 2020
Electro-migration barrier for Cu interconnect
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10163795B2Dec 25, 2018
Electro-migration barrier for Cu interconnect
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9218998B2Dec 22, 2015
Electrostatic chuck with multi-zone control
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49