Inventor

SHIOKAWA YOICHI

JP20 patents

⚠️ This page may combine multiple inventors who share the name “SHIOKAWA YOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIOKAWA YOICHI

EBARA CORP

Substrate processing apparatus, substrate processing system, and substrate processing method

Substrate processing apparatus, substrate processing system, and substrate processing method

Polishing apparatus and polishing method

Polishing method and polishing apparatus

Polishing method

Polishing apparatus and polished-state monitoring method

Polishing device and polishing method

Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus

Substrate processing apparatus, substrate processing system, and substrate processing method

Optical film-thickness measuring apparatus and polishing apparatus

Polishing apparatus and polishing method

Substrate polishing apparatus, method of creating thickness map, and method of polishing a substrate

Measuring film-thickness of a workpiece in a semiconductor processing apparatus using a composite spectrum

Polishing apparatus and polishing method

Method of cleaning a substrate

Polishing method and polishing apparatus

Head height adjustment device and substrate processing apparatus provided with head height adjustment device

SONE TADAKAZU

Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatus

FUKUDA AKIRA

Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus

SHIOKAWA YOICHI

Tray for preparing a dentiform model used for an operation on a dental technic