Inventor

SHIGAKI SHUHEI

JP24 patents

⚠️ This page may combine multiple inventors who share the name “SHIGAKI SHUHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIGAKI SHUHEI

NISSAN CHEMICAL IND LTD

Silicon-containing EUV resist underlayer film-forming composition including additive

Silicon-containing EUV resist underlayer film-forming composition containing onium sulfonate

Composition for coating resist pattern

Silicon-containing EUV resist underlayer film forming composition

Film forming composition containing fluorine-containing surfactant

Film forming composition containing fluorine-containing surfactant

Silicon-containing resist underlayer film-forming composition having organic group having aliphatic polycyclic structure

Silicon-containing coating agent for reversing planarization pattern

Coating liquid to be applied to resist pattern and method for forming reverse pattern

Cleaning fluid for semiconductor, and cleaning method using the same

Coating liquid for resist pattern coating

Polymer-containing coating liquid applied to resist pattern

Composition for forming silicon-containing resist underlayer film having cyclic diester group

NISSAN CHEMICAL CORP

Method for producing resist pattern coating composition with use of solvent replacement method

Coating composition for pattern inversion

Silicon-containing coating agent for pattern reversal

Planarization method for a semiconductor substrate using a silicon-containing composition

Film-forming composition

Composition for forming resist underlying film

Composition for resist pattern metallization process

SAMSUNG ELECTRONICS CO LTD

Substrate treating composition and method for fabricating a semiconductor device using the same

Substrate treating composition and method for fabricating a semiconductor device using the same

SHIONOGI & CO

Method for evaluation of drug efficacy of a medicine having a therapeutic or preventive effect against a disease related to EL activity and a method for screening an inhibitor of EL activity

NAKAJIMA MAKOTO

Thin film forming composition for lithography containing titanium and silicon