Inventor
YAGUCHI HIROAKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “YAGUCHI HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NISSAN CHEMICAL IND LTD
5 patentsUS10139729B2Nov 27, 2018
Coating composition for pattern reversal on soc pattern
NISSAN CHEMICAL IND LTD2 citations73
US9627217B2Apr 18, 2017
Silicon-containing EUV resist underlayer film-forming composition including additive
NISSAN CHEMICAL IND LTD2 citations71
US10558119B2Feb 11, 2020
Composition for coating resist pattern
NISSAN CHEMICAL IND LTD1 citations62
US9337052B2May 10, 2016
Silicon-containing EUV resist underlayer film forming composition
NISSAN CHEMICAL IND LTD2 citations61
US10508174B2Dec 17, 2019
Silicon-containing coating agent for reversing planarization pattern
NISSAN CHEMICAL IND LTD0 citations51
NISSAN CHEMICAL CORP
4 patentsUS12084592B2Sep 10, 2024
Coating composition for pattern inversion
NISSAN CHEMICAL CORP0 citations51
US11884839B2Jan 30, 2024
Acetal-protected silanol group-containing polysiloxane composition
NISSAN CHEMICAL CORP0 citations51
US11609499B2Mar 21, 2023
Silicon-containing coating agent for pattern reversal
NISSAN CHEMICAL CORP0 citations51
US10910220B2Feb 2, 2021
Planarization method for a semiconductor substrate using a silicon-containing composition
NISSAN CHEMICAL CORP0 citations51