Inventor

KENDALL RODNEY A

US21 patents

⚠️ This page may combine multiple inventors who share the name “KENDALL RODNEY A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KENDALL RODNEY A

IBM

Electron beam lithography apparatus with self actuated vacuum bypass valve

Membrane electrostatic chuck

Lithography tool with vibration isolation

Distributed direct write lithography system using multiple variable shaped electron beams

Servo guided stage system

Method for writing a pattern using multiple variable shaped electron beams

Multiple variable shaped electron beam system with lithographic structure

Electron beam nano-metrology system

Two-dimensional positioning apparatus

High emittance electron source having high illumination uniformity

Spinning reticle scanning projection lithography exposure system and method

Ball joint with dynamic preload adjustment

Adjustment of particle beam landing angle

Calibration target for electron beams

Electron scatter in a thin membrane to eliminate detector saturation

Electron beam position reference system

Remote clamping mechanism via vacuum feedthrough

NIKON CORP

Multiple numerical aperture electron beam projection lithography system

Symmetric blanking for high stability in electron beam exposure systems

Fabrication method of high precision, thermally stable electromagnetic coil vanes

High performance source for electron beam projection lithography