Inventor
BOHNENKAMP CARL E
US3 patents
Patents
3 patentsUS6091187AJul 18, 2000
High emittance electron source having high illumination uniformity
IBM19 citations90
US6046457AApr 4, 2000
Charged particle beam apparatus having anticontamination means
IBM8 citations70
US7183758B2Feb 27, 2007
Automatic exchange of degraders in accelerated testing of computer chips
IBM1 citations47