Inventor
STURTEVANT JOHN L
US10 patents
⚠️ This page may combine multiple inventors who share the name “STURTEVANT JOHN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEGRATED DEVICE TECH
4 patentsUS7349752B1Mar 25, 2008
Dynamically coupled metrology and lithography
INTEGRATED DEVICE TECH19 citations91
US6733936B1May 11, 2004
Method for generating a swing curve and photoresist feature formed using swing curve
INTEGRATED DEVICE TECH18 citations91
US6797456B1Sep 28, 2004
Dual-layer deep ultraviolet photoresist process and structure
INTEGRATED DEVICE TECH17 citations82
US6913872B1Jul 5, 2005
Dual-wavelength exposure for reduction of implant shadowing
INTEGRATED DEVICE TECH14 citations76
MENTOR GRAPHICS CORP
2 patentsUS11061373B1Jul 13, 2021
Method and system for calculating probability of success or failure for a lithographic process due to stochastic variations of the lithographic process
MENTOR GRAPHICS CORP12 citations82
US10445452B2Oct 15, 2019
Simulation-assisted wafer rework determination
MENTOR GRAPHICS CORP0 citations35