Inventor
KITSON TERRI JO
US3 patents
Patents
3 patentsUS6096661AAug 1, 2000
Method for depositing silicon dioxide using low temperatures
ADVANCED MICRO DEVICES INC58 citations95
US6140255AOct 31, 2000
Method for depositing silicon nitride using low temperatures
ADVANCED MICRO DEVICES INC43 citations91
US6114224ASep 5, 2000
System and method for using N2 O plasma treatment to eliminate defects at an interface between a stop layer and an integral layered dielectric
ADVANCED MICRO DEVICES INC17 citations82