Inventor
MOR ELI
US7 patents
Patents
7 patentsUS10847393B2Nov 24, 2020
Method and apparatus for measuring process kit centering
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US10794681B2Oct 6, 2020
Long range capacitive gap measurement in a wafer form sensor system
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US12265377B2Apr 1, 2025
Autonomous substrate processing system
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US11387122B2Jul 12, 2022
Method and apparatus for measuring process kit centering
APPLIED MATERIALS INC2 citations71
US11709477B2Jul 25, 2023
Autonomous substrate processing system
APPLIED MATERIALS INC3 citations69
US11978647B2May 7, 2024
Method and apparatus for measuring erosion and calibrating position for a moving process kit
APPLIED MATERIALS INC0 citations55
US11521872B2Dec 6, 2022
Method and apparatus for measuring erosion and calibrating position for a moving process kit
APPLIED MATERIALS INC0 citations55