Inventor
MOON SUNMIN
KR12 patents
Patents
12 patentsUS10453913B2Oct 22, 2019
Capacitor, semiconductor device and methods of manufacturing the capacitor and the semiconductor device
SAMSUNG ELECTRONICS CO LTD5 citations82
US10892345B2Jan 12, 2021
Semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations72
US10658454B2May 19, 2020
Capacitor, semiconductor device and methods of manufacturing the capacitor and the semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations71
US11081338B2Aug 3, 2021
Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations70
US12324145B2Jun 3, 2025
Semiconductor device with capping conductive layer on an electrode and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations61
US11764283B2Sep 19, 2023
Semiconductor device including capacitor
SAMSUNG ELECTRONICS CO LTD0 citations61
US11665884B2May 30, 2023
Semiconductor device with capping conductive layer on an electrode and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations61
US11621339B2Apr 4, 2023
Semiconductor device including capacitor
SAMSUNG ELECTRONICS CO LTD0 citations61
US11114541B2Sep 7, 2021
Semiconductor device including capacitor
SAMSUNG ELECTRONICS CO LTD0 citations61
US11728160B2Aug 15, 2023
Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations60
US12334308B2Jun 17, 2025
Batch-type apparatus for atomic layer etching (ALE), and ALE method and semiconductor device manufacturing method based on the same apparatus
SAMSUNG ELECTRONICS CO LTD0 citations51
US10090377B2Oct 2, 2018
Semiconductor device including capacitor
SAMSUNG ELECTRONICS CO LTD0 citations49