Inventor

BORDEN PETER G

US59 patents

⚠️ This page may combine multiple inventors who share the name “BORDEN PETER G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BORDEN PETER G

APPLIED MATERIALS INC

High throughput measurement of via defects in interconnects

Measuring a property of a layer in multilayered structure

Apparatus and method for measuring a property of a layer in a multilayered structure

Calibration as well as measurement on the same workpiece during fabrication

Method for patterning Mo layer in a photovoltaic device comprising CIGS material using an etch process

Evaluating a geometric or material property of a multilayered structure

Matching dose and energy of multiple ion implanters

Evaluation of openings in a dielectric layer

Use of scanning beam for differential evaluation of adjacent regions for change in reflectivity

Evaluating a multi-layered structure for voids

Apparatus and method for measuring a property of a layer in a multilayered structure

Differential evaluation of adjacent regions for change in reflectivity

Evaluating a multi-layered structure for voids

Apparatus and method for determining the active dopant profile in a semiconductor wafer

Use of coefficient of a power curve to evaluate a semiconductor wafer

BOXER CROSS INC

Apparatus and method for determining the active dopant profile in a semiconductor wafer

Apparatus and method for measuring a property of a layer in a multilayered structure

Apparatus and method for evaluating a wafer of semiconductor material

System and method for measuring the microroughness of a surface of a substrate

System and method for measuring properties of a semiconductor substrate in a fabrication line

System and method for measuring the doping level and doping profile of a region in a semiconductor substrate

System and method for measuring the microroughness of a surface of a substrate

Apparatus and method for determining the active dopant profile in a semiconductor wafer

Apparatus and method for determining the active dopant profile in a semiconductor wafer

Identifying defects in a conductive structure of a wafer, based on heat transfer therethrough

Evaluating a multi-layered structure for voids

Evaluating a geometric or material property of a multilayered structure

Evaluating sidewall coverage in a semiconductor wafer

Use of a coefficient of a power curve to evaluate a semiconductor wafer

HIGH YIELD TECHNOLOGY

Apparatus and a method for dynamically tuning a particle sensor in response to varying process conditions

Scattering-type particle detection device for use in high temperature process chambers

Particle detector for flowing liquids with the ability to distinguish bubbles via photodiodes disposed 180° apart

In situ real time particle monitor for a sputter coater chamber

Modular particle monitor for vacuum process equipment

Structure and method for providing a gas purge for a vacuum particle sensor installed in a corrosive or coating environment

System for detection of extremely small particles in a low pressure environment

Real-time particle counter for liquids with nebulizer and dryer

Concentrator funnel for vacuum line particle monitors

Apparatus for scanning a flat surface to detect defects

Quasi bright field particle sensor

Method for synchronizing particle counters to external events

Particle monitor for throttled pumping systems

Low cost stage for raster scanning of semiconductor wafers

VARIAN ASSOCIATES

Three-terminal solar cell circuit

Monolithic series-connected solar cell

Grooved solar cell for deployment at set angle

(unassigned)

Apparatus and method for evaluating a semiconductor wafer

BORDEN PETER G

Stacked load-lock apparatus and method for high throughput solar cell manufacturing

PORTHOUSE KEITH BRIAN

Advanced platform for processing crystalline silicon solar cells

FISHER PIERCE CO

Apparatus and method for reducing stray laser light in particle sensors using a narrow band filter