Inventor
Soong Chia-Wei
TW11 patents
Patents
11 patentsUS10109507B2Oct 23, 2018
Fluorine contamination control in semiconductor manufacturing process
TAIWAN SEMICONDUCTOR MFG CO LTD13 citations83
US10797052B2Oct 6, 2020
Method and structure for FinFET devices
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9947658B2Apr 17, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11855089B2Dec 26, 2023
Method and structure for FinFET devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11569230B2Jan 31, 2023
Method and structure for FinFET devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11107810B2Aug 31, 2021
Fin field effect transistor (FinFET) device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10276568B2Apr 30, 2019
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10262878B2Apr 16, 2019
Fluorine contamination control in semiconductor manufacturing process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10157924B2Dec 18, 2018
Method and structure for FinFET devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9831242B2Nov 28, 2017
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9553172B2Jan 24, 2017
Method and structure for FinFET devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51