Inventor
JEANG EUNHEE
KR9 patents
Patents
9 patentsUS12224214B2Feb 11, 2025
Method of fabricating a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations58
US11955387B2Apr 9, 2024
Method of fabricating a semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations58
US12538758B2Jan 27, 2026
Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system
SAMSUNG ELECTRONICS CO LTD0 citations56
US11823961B2Nov 21, 2023
Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system
SAMSUNG ELECTRONICS CO LTD1 citations56
US11715628B2Aug 1, 2023
Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations56
US12487532B2Dec 2, 2025
EUV collector inspection apparatus and inspection method
SAMSUNG ELECTRONICS CO LTD0 citations55
US11946809B2Apr 2, 2024
Polarization measuring device and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US11996270B2May 28, 2024
Wafer processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations43
US12298671B2May 13, 2025
Illumination correction apparatus
SAMSUNG ELECTRONICS CO LTD0 citations39