Inventor
SIMON YOSSI
IL10 patents
⚠️ This page may combine multiple inventors who share the name “SIMON YOSSI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
9 patentsUS11899375B2Feb 13, 2024
Massive overlay metrology sampling with multiple measurement columns
KLA CORP2 citations72
US12001148B2Jun 4, 2024
Enhancing performance of overlay metrology
KLA CORP2 citations70
US11556738B2Jan 17, 2023
System and method for determining target feature focus in image-based overlay metrology
KLA CORP2 citations70
US12379669B2Aug 5, 2025
Massive overlay metrology sampling with multiple measurement columns
KLA CORP0 citations61
US11921825B2Mar 5, 2024
System and method for determining target feature focus in image-based overlay metrology
KLA CORP0 citations59
US11592755B2Feb 28, 2023
Enhancing performance of overlay metrology
KLA CORP1 citations59
US11933717B2Mar 19, 2024
Sensitive optical metrology in scanning and static modes
KLA CORP0 citations51
US12222199B2Feb 11, 2025
Systems and methods for measurement of misregistration and amelioration thereof
KLA CORP0 citations50
US12131959B2Oct 29, 2024
Systems and methods for improved metrology for semiconductor device wafers
KLA CORP0 citations48