Inventor
CHEN CHAO-HSUAN
TW9 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHAO-HSUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS11348800B2May 31, 2022
Ultra narrow trench patterning with dry plasma etching
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10811270B2Oct 20, 2020
Ultra narrow trench patterning using plasma etching
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US12302596B2May 13, 2025
Fin field-effect transistor and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11942532B2Mar 26, 2024
Fin field-effect transistor and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11894237B2Feb 6, 2024
Ultra narrow trench patterning with dry plasma etching
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60