Inventor

SHCHEMELININ ANATOLY

US50 patents

⚠️ This page may combine multiple inventors who share the name “SHCHEMELININ ANATOLY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHCHEMELININ ANATOLY

KLA TENCOR CORP

Method and system for generating a light-sustained plasma in a flanged transmission element

Plasma cell for laser-sustained plasma light source

Method and system for controlling convection within a plasma cell

Continuous-wave laser-sustained plasma illumination source

System and method for imaging a sample with a laser sustained plasma illumination output

Method and system for controlling convective flow in a light-sustained plasma

Open plasma lamp for forming a light-sustained plasma

Plasma cell for providing VUV filtering in a laser-sustained plasma light source

Systems for providing illumination in optical metrology

System and method for transverse pumping of laser-sustained plasma

Spectrometer for vacuum ultraviolet measurements in high-pressure environment

High efficiency laser-sustained plasma light source

Continuous-wave laser-sustained plasma illumination source

System and method for LADAR-based optic alignment and characterization

High power broadband light source

Open plasma lamp for forming a light-sustained plasma

System and method for separation of pump light and collected light in a laser pumped light source

Method and system for controlling convection within a plasma cell

Laser sustained plasma light source with graded absorption features

System and method for electrodeless plasma ignition in laser-sustained plasma light source

System and method for inhibiting radiative emission of a laser-sustained plasma source

System and method for inhibiting VUV radiative emission of a laser-sustained plasma source

Laser sustained plasma bulb including water

Plasma cell for providing VUV filtering in a laser-sustained plasma light source

System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination

Laser-sustained plasma light source

Laser-sustained plasma light source

Systems for providing illumination in optical metrology

Differential imaging for single-path optical wafer inspection

System and method for pumping laser sustained plasma with a frequency converted illumination source

System and method for separation of pump light and collected light in a laser pumped light source

Non-contact thermal measurements of VUV optics

Method and system for controlling convective flow in a light-sustained plasma

Gas refraction compensation for laser-sustained plasma bulbs

Sub 200nm laser pumped homonuclear excimer lasers

Laser sustained plasma light source with electrically induced gas flow

Plasma cell with floating flange

System and method for laser-sustained plasma illumination

BEZEL ILYA

Laser-sustained plasma light source

Gas refraction compensation for laser-sustained plasma bulbs

Full numerical aperture pump of laser-sustained plasma

Optically pumping to sustain plasma

Adaptive optics for compensating aberrations in light-sustained plasma cells

KLA CORP

Laser sustained plasma light source with high pressure flow

Asymmetric gas bearing bushing for thermo-pump

High efficiency laser-sustained plasma light source with collection of broadband radiation

Sapphire lamp for laser sustained plasma broadband light source

SHCHEMELININ ANATOLY

Initiating laser-sustained plasma

BEZEL ILYA V

Multi-wavelength pumping to sustain hot plasma

KLA TENCOR TECH CORP

Pulse stretcher