Inventor

BEZEL ILYA

US70 patents

⚠️ This page may combine multiple inventors who share the name “BEZEL ILYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BEZEL ILYA

KLA TENCOR CORP

Method and system for generating a light-sustained plasma in a flanged transmission element

Plasma cell for laser-sustained plasma light source

Method and system for controlling convection within a plasma cell

Continuous-wave laser-sustained plasma illumination source

System and method for imaging a sample with a laser sustained plasma illumination output

Method and system for controlling convective flow in a light-sustained plasma

Open plasma lamp for forming a light-sustained plasma

Plasma cell for providing VUV filtering in a laser-sustained plasma light source

Light source with nanostructured antireflection layer

Laser sustained plasma light source with forced flow through natural convection

Systems for providing illumination in optical metrology

System and method for transverse pumping of laser-sustained plasma

Spectrometer for vacuum ultraviolet measurements in high-pressure environment

High efficiency laser-sustained plasma light source

High power broadband illumination source

Continuous-wave laser-sustained plasma illumination source

High power broadband light source

Open plasma lamp for forming a light-sustained plasma

System and method for separation of pump light and collected light in a laser pumped light source

Method and system for controlling convection within a plasma cell

Laser sustained plasma light source with graded absorption features

Broadband light source including transparent portion with high hydroxide content

System and method for electrodeless plasma ignition in laser-sustained plasma light source

System and method for inhibiting radiative emission of a laser-sustained plasma source

System and method for inhibiting VUV radiative emission of a laser-sustained plasma source

Laser sustained plasma bulb including water

System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution

Plasma cell for providing VUV filtering in a laser-sustained plasma light source

System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination

Laser-sustained plasma light source

Laser-sustained plasma light source

Systems for providing illumination in optical metrology

KLA CORP

Swirler for laser-sustained plasma light source with reverse vortex flow

Laser-sustained plasma source based on colliding liquid jets

Laser-sustained plasma light source with gas vortex flow

Laser-sustained plasma light source with reverse vortex flow

Laser-sustained plasma lamps with graded concentration of hydroxyl radical

High efficiency laser-sustained plasma light source with collection of broadband radiation

Laser-sustained plasma light source with tapered window

System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources

System and method for pumping laser sustained plasma with interlaced pulsed illumination sources

Sapphire lamp for laser sustained plasma broadband light source

System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution

Rotating lamp for laser-sustained plasma illumination source

BEZEL ILYA

Laser-sustained plasma light source

Gas refraction compensation for laser-sustained plasma bulbs

Full numerical aperture pump of laser-sustained plasma

Optically pumping to sustain plasma

SHCHEMELININ ANATOLY

Initiating laser-sustained plasma

KLA TENCOR TECH CORP

Pulse stretcher