Inventor

KHODYKIN OLEG

US23 patents

⚠️ This page may combine multiple inventors who share the name “KHODYKIN OLEG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KHODYKIN OLEG

KLA TENCOR CORP

Systems and methods for combined x-ray reflectometry and photoelectron spectroscopy

Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction

System and method for generation of extreme ultraviolet light

Plasma-based light source

High power broadband illumination source

X-ray metrology system with broadband laser produced plasma illuminator

Debris protection system for reflective optic utilizing gas flow

Plasma based light source having a target material coated on a cylindrically-symmetric element

System and method for producing an exclusionary buffer gas flow in an EUV light source

Apparatus and methods for optics protection from debris in plasma-based light source

Laser produced plasma light source having a target material coated on a cylindrically-symmetric element

EUV light source using cryogenic droplet targets in mask inspection

Laser produced plasma light source having a target material coated on a cylindrically-symmetric element

Droplet generation for a laser produced plasma light source

Phase grating for mask inspection system

System and method for x-ray imaging and classification of volume defects

KLA CORP

Laser-sustained plasma lamps with graded concentration of hydroxyl radical

Systems and methods for combined reflectometry and photoelectron spectroscopy

Laser produced plasma light source having a target material coated on a cylindrically-symmetric element

Droplet generation for a laser produced plasma light source

Sapphire lamp for laser sustained plasma broadband light source

Laser-sustained plasma generation in supersonic gas jets

KLA—TENCOR CORP

Bright and clean x-ray source for x-ray based metrology