Inventor
ITOGA TAKASHI
JP12 patents
Patents
12 patentsUS7508034B2Mar 24, 2009
Single-crystal silicon substrate, SOI substrate, semiconductor device, display device, and manufacturing method of semiconductor device
SHARP KK347 citations99
US7488980B2Feb 10, 2009
Thin film semiconductor device and fabrication method therefor
SHARP KK270 citations99
US7619250B2Nov 17, 2009
Semiconductor device and manufacturing method thereof, SOI substrate and display device using the same, and manufacturing method of the SOI substrate
SHARP KK73 citations98
US5796116AAug 18, 1998
Thin-film semiconductor device including a semiconductor film with high field-effect mobility
SHARP KK291 citations96
US6271062B1Aug 7, 2001
Thin film semiconductor device including a semiconductor film with high field-effect mobility
SHARP KK47 citations94
US7884367B2Feb 8, 2011
Semiconductor device and manufacturing method thereof, SOI substrate and display device using the same, and manufacturing method of the SOI substrate
SHARP KK19 citations92
US7262464B2Aug 28, 2007
Semiconductor device with single crystal semiconductor layer(s) bonded to insulating surface of substrate
SHARP KK31 citations92
US7253040B2Aug 7, 2007
Fabrication method of semiconductor device
SHARP KK29 citations92
US7244990B2Jul 17, 2007
Semiconductor device
SHARP KK24 citations92
US7919392B2Apr 5, 2011
Semiconductor device and method of manufacturing the same
SHARP KK14 citations84
US6620744B2Sep 16, 2003
Insulating film formation method, semiconductor device, and production apparatus
SHARP KK4 citations62
US7999400B2Aug 16, 2011
Semiconductor device with recessed registration marks partially covered and partially uncovered
SHARP KK0 citations52