Inventor
UENO KINYA
JP20 patents
⚠️ This page may combine multiple inventors who share the name “UENO KINYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
19 patentsUS5882433AMar 16, 1999
Spin cleaning method
TOKYO ELECTRON LTD349 citations99
US5940985AAug 24, 1999
Apparatus and method for drying substrates
TOKYO ELECTRON LTD129 citations98
US6299696B2Oct 9, 2001
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD69 citations96
US6131588AOct 17, 2000
Apparatus for and method of cleaning object to be processed
TOKYO ELECTRON LTD45 citations96
US6050275AApr 18, 2000
Apparatus for and method of cleaning objects to be processed
TOKYO ELECTRON LTD53 citations96
US5421905AJun 6, 1995
Method for washing wafers
TOKYO ELECTRON LTD58 citations96
US6001191ADec 14, 1999
Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus
TOKYO ELECTRON LTD76 citations95
US6746543B2Jun 8, 2004
Apparatus for and method of cleaning objects to be processed
TOKYO ELECTRON LTD23 citations92
US6613692B1Sep 2, 2003
Substrate processing method and apparatus
TOKYO ELECTRON LTD35 citations92
US6491045B2Dec 10, 2002
Apparatus for and method of cleaning object to be processed
TOKYO ELECTRON LTD15 citations92
US6413355B1Jul 2, 2002
Apparatus for and method of cleaning objects to be processed
TOKYO ELECTRON LTD22 citations92
US6394110B2May 28, 2002
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD30 citations92
US6342104B1Jan 29, 2002
Method of cleaning objects to be processed
TOKYO ELECTRON LTD37 citations92
US6319329B1Nov 20, 2001
Method of cleaning objects to be processed
TOKYO ELECTRON LTD17 citations92
US6045624AApr 4, 2000
Apparatus for and method of cleaning objects to be processed
TOKYO ELECTRON LTD37 citations92
US5261431ANov 16, 1993
Washing apparatus
TOKYO ELECTRON LTD42 citations92
US5236515AAug 17, 1993
Cleaning device
TOKYO ELECTRON LTD29 citations92
US6554010B1Apr 29, 2003
Substrate cleaning tool, having permeable cleaning head
TOKYO ELECTRON LTD23 citations90
US7191785B2Mar 20, 2007
Substrate processing apparatus for resist film removal
TOKYO ELECTRON LTD6 citations73