Inventor
KUMAGAI YOSHIO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KUMAGAI YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS6001191ADec 14, 1999
Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus
TOKYO ELECTRON LTD76 citations95
US5845660ADec 8, 1998
Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus
TOKYO ELECTRON LTD84 citations95
US6620260B2Sep 16, 2003
Substrate rinsing and drying method
TOKYO ELECTRON LTD28 citations92
US5873177AFeb 23, 1999
Spin dryer and substrate drying method
TOKYO ELECTRON LTD44 citations92
US5236515AAug 17, 1993
Cleaning device
TOKYO ELECTRON LTD29 citations92
US5188136AFeb 23, 1993
Cleaning device
TOKYO ELECTRON LTD28 citations91