Inventor

LEHNER ERIC A

US3 patents

⚠️ This page may combine multiple inventors who share the name “LEHNER ERIC A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CORNELL RES FOUNDATION INC

2 patents

US5318877AJun 7, 1994

Bilayer resist and process for preparing same

CORNELL RES FOUNDATION INC34 citations91

US5290397AMar 1, 1994

Bilayer resist and process for preparing same

CORNELL RES FOUNDATION INC34 citations91

TOSHIBA KK

1 patent

US5897982AApr 27, 1999

Resist develop process having a post develop dispense step

TOSHIBA KK28 citations90