Inventor
OHTSUKI TOMOKO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “OHTSUKI TOMOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
13 patentsUS7023610B2Apr 4, 2006
Ultraviolet laser apparatus and exposure apparatus using same
NIKON CORP495 citations99
US6590698B1Jul 8, 2003
Ultraviolet laser apparatus and exposure apparatus using same
NIKON CORP162 citations99
US6901090B1May 31, 2005
Exposure apparatus with laser device
NIKON CORP109 citations97
US7136402B1Nov 14, 2006
Laser device and exposure method
NIKON CORP55 citations96
US6088379AJul 11, 2000
Ultraviolet laser apparatus and semiconductor exposure apparatus
NIKON CORP59 citations96
US7098992B2Aug 29, 2006
Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device
NIKON CORP90 citations95
US7212275B2May 1, 2007
Exposure apparatus with laser device
NIKON CORP37 citations92
US6947123B1Sep 20, 2005
Exposure device with laser device
NIKON CORP35 citations92
US6339634B1Jan 15, 2002
Soft x-ray light source device
NIKON CORP47 citations92
US6049558AApr 11, 2000
Optical elements for guiding laser light and laser systems comprising same
NIKON CORP19 citations84
US7277220B2Oct 2, 2007
Ultraviolet laser apparatus and exposure apparatus using same
NIKON CORP4 citations74
US7126745B2Oct 24, 2006
Method of irradiating ultraviolet light onto an object
NIKON CORP4 citations74
US6078598AJun 20, 2000
Laser apparatus, pulsed laser oscillation method and projection exposure apparatus using the same
NIKON CORP12 citations74
IBM
3 patentsUS5224080AJun 29, 1993
Method , apparatus, and medium for magneto-optical recording
IBM25 citations92
US5325343AJun 28, 1994
Magneto-optical recording medium having two RE-TM layers with the same Curie temperature
IBM17 citations82
US5329505AJul 12, 1994
System and method for overwriteable magneto-optical recording
IBM5 citations62