Inventor
FUKASAWA YOSHIO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “FUKASAWA YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS6074518AJun 13, 2000
Plasma processing apparatus
TOKYO ELECTRON LTD276 citations98
US5716534AFeb 10, 1998
Plasma processing method and plasma etching method
TOKYO ELECTRON LTD145 citations97
US5611655AMar 18, 1997
Vacuum process apparatus and vacuum processing method
TOKYO ELECTRON LTD143 citations94
US5560804AOct 1, 1996
Etching method for silicon containing layer
TOKYO ELECTRON LTD19 citations91
US5314573AMay 24, 1994
Dry etching polysilicon using a bromine-containing gas
TOKYO ELECTRON LTD17 citations72
US5246529ASep 21, 1993
Plasma processing method
TOKYO ELECTRON LTD17 citations72