Inventor
CHU RON-FU
TW20 patents
⚠️ This page may combine multiple inventors who share the name “CHU RON-FU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
7 patentsUS5863307AJan 26, 1999
Method and slurry composition for chemical-mechanical polish (CMP) planarizing of copper containing conductor layers
CHARTERED SEMICONDUCTOR MFG91 citations97
US5496666AMar 5, 1996
Contact hole mask for semiconductor fabrication
CHARTERED SEMICONDUCTOR MFG53 citations90
US5582679ADec 10, 1996
Enhanced metal etch process
CHARTERED SEMICONDUCTOR MFG24 citations89
US5795699AAug 18, 1998
Langmuir-blodgett (LB) films as ARC and adhesion promoters for patterning of semiconductor devices
CHARTERED SEMICONDUCTOR MFG18 citations84
US5734594AMar 31, 1998
Method and system for enhancement of wafer alignment accuracy
CHARTERED SEMICONDUCTOR MFG8 citations71
US6451706B1Sep 17, 2002
Attenuation of reflecting lights by surface treatment
CHARTERED SEMICONDUCTOR MFG2 citations62
US5728493AMar 17, 1998
Antireflection mask for contact hole opening
CHARTERED SEMICONDUCTOR MFG1 citations42
LEE TZUNG-HAN
7 patentsUS8471320B2Jun 25, 2013
Memory layout structure
LEE TZUNG-HAN2 citations62
US8298892B1Oct 30, 2012
Fabricating method of insulator
LEE TZUNG-HAN4 citations62
US8779494B2Jul 15, 2014
High-k metal gate random access memory
LEE TZUNG-HAN0 citations51
US8703562B2Apr 22, 2014
Manufacturing method of random access memory
LEE TZUNG-HAN1 citations51
US8703575B2Apr 22, 2014
Method of forming isolation area and structure thereof
LEE TZUNG-HAN0 citations51
US8604620B2Dec 10, 2013
Semiconductor structure having lateral through silicon via
LEE TZUNG-HAN0 citations47
US8486801B2Jul 16, 2013
Fabricating method of DRAM structure
LEE TZUNG-HAN0 citations41
NANYA TECHNOLOGY CORP
4 patentsUS6696227B2Feb 24, 2004
Shift multi-exposure method
NANYA TECHNOLOGY CORP6 citations62
US6551520B1Apr 22, 2003
Exhausting method and means in a dry etching apparatus
NANYA TECHNOLOGY CORP6 citations62
US6139251AOct 31, 2000
Stepper alignment method and apparatus
NANYA TECHNOLOGY CORP6 citations62
US5857127AJan 5, 1999
Apparatus for the photoresist development process of an integrated circuit fabrication
NANYA TECHNOLOGY CORP2 citations62