Inventor
BERNSTEIN JAMES D
US10 patents
⚠️ This page may combine multiple inventors who share the name “BERNSTEIN JAMES D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
5 patentsUS7208330B2Apr 24, 2007
Method for varying the uniformity of a dopant as it is placed in a substrate by varying the speed of the implant across the substrate
TEXAS INSTRUMENTS INC10 citations78
US7232744B2Jun 19, 2007
Method for implanting dopants within a substrate by tilting the substrate relative to the implant source
TEXAS INSTRUMENTS INC7 citations70
US7253072B2Aug 7, 2007
Implant optimization scheme
TEXAS INSTRUMENTS INC3 citations56
US7807978B2Oct 5, 2010
Divergent charged particle implantation for improved transistor symmetry
TEXAS INSTRUMENTS INC0 citations48
US7385202B2Jun 10, 2008
Divergent charged particle implantation for improved transistor symmetry
TEXAS INSTRUMENTS INC0 citations48
AXCELIS TECH INC
3 patentsUS6237527B1May 29, 2001
System for improving energy purity and implant consistency, and for minimizing charge accumulation of an implanted substrate
AXCELIS TECH INC281 citations98
US6221169B1Apr 24, 2001
System and method for cleaning contaminated surfaces in an ion implanter
AXCELIS TECH INC64 citations94
US6458430B1Oct 1, 2002
Pretreatment process for plasma immersion ion implantation
AXCELIS TECH INC64 citations92