Inventor
SHUE SHAULIN
TW8 patents
⚠️ This page may combine multiple inventors who share the name “SHUE SHAULIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
7 patentsUS5702972ADec 30, 1997
Method of fabricating MOSFET devices
TAIWAN SEMICONDUCTOR MFG59 citations96
US5970378AOct 19, 1999
Multi-step plasma treatment process for forming low resistance titanium nitride layer
TAIWAN SEMICONDUCTOR MFG71 citations95
US6309964B1Oct 30, 2001
Method for forming a copper damascene structure over tungsten plugs with improved adhesion, oxidation resistance, and diffusion barrier properties using nitridation of the tungsten plug
TAIWAN SEMICONDUCTOR MFG24 citations92
US6077779AJun 20, 2000
Multi-step deposition to improve the conformality of ionized PVD films
TAIWAN SEMICONDUCTOR MFG21 citations92
US5688718ANov 18, 1997
Method of CVD TiN barrier layer integration
TAIWAN SEMICONDUCTOR MFG26 citations91
US6875692B1Apr 5, 2005
Copper electromigration inhibition by copper alloy formation
TAIWAN SEMICONDUCTOR MFG18 citations83
US6849173B1Feb 1, 2005
Technique to enhance the yield of copper interconnections
TAIWAN SEMICONDUCTOR MFG6 citations62