Inventor

IVALDI JORGE S

US6 patents

⚠️ This page may combine multiple inventors who share the name “IVALDI JORGE S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML US INC

2 patents

US6411426B1Jun 25, 2002

Apparatus, system, and method for active compensation of aberrations in an optical system

ASML US INC58 citations93

US6398373B1Jun 4, 2002

Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems

ASML US INC47 citations89

ASML HOLDING NV

2 patents

US7249925B2Jul 31, 2007

System and method for reticle protection and transport

ASML HOLDING NV14 citations90

US6991416B2Jan 31, 2006

System and method for reticle protection and transport

ASML HOLDING NV23 citations90

(unassigned)

2 patents

US6619903B2Sep 16, 2003

System and method for reticle protection and transport

33 citations89

US6559922B2May 6, 2003

Method and apparatus for a non-contact scavenging seal

22 citations81