Inventor

HURST HENRY W

US2 patents

Patents

2 patents

US6437386B1Aug 20, 2002

Method for creating thick oxide on the bottom surface of a trench structure in silicon

FAIRCHILD SEMICONDUCTOR59 citations93

US6861296B2Mar 1, 2005

Method for creating thick oxide on the bottom surface of a trench structure in silicon

FAIRCHILD SEMICONDUCTOR36 citations89