Inventor

ITOH KIYOTO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “ITOH KIYOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NEC ELECTRONICS CORP

1 patent

US6698469B2Mar 2, 2004

Cylinder cabinet and method of purging remaining gas in the pipe thereof

NEC ELECTRONICS CORP7 citations68

ASM JAPAN

1 patent

US7560144B2Jul 14, 2009

Method of stabilizing film quality of low-dielectric constant film

ASM JAPAN1 citations45