Inventor
KO YONG-KYUN
KR9 patents
Patents
9 patentsUS6883248B2Apr 26, 2005
Apparatus for drying a substrate using an isopropyl alcohol vapor
SAMSUNG ELECTRONICS CO LTD26 citations90
US6959823B2Nov 1, 2005
Wafer guides for processing semiconductor substrates
SAMSUNG ELECTRONICS CO LTD15 citations83
US7311857B2Dec 25, 2007
Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD13 citations81
US6149731ANov 21, 2000
Valve cleaning method
SAMSUNG ELECTRONICS CO LTD9 citations72
US6939410B2Sep 6, 2005
Apparatus and method for collecting impurities on a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD11 citations67
US7100306B2Sep 5, 2006
Wafer guides for processing semiconductor substrates
SAMSUNG ELECTRONICS CO LTD4 citations62
US6905570B2Jun 14, 2005
Apparatus for manufacturing integrated circuit device
SAMSUNG ELECTRONICS CO LTD5 citations62
US5948690ASep 7, 1999
Pretreatment system for analyzing impurities contained in flat sample
SAMSUNG ELECTRONICS CO LTD3 citations62
US6137018AOct 24, 2000
Chemical refining method and reuse system for semiconductor device manufacturing
SAMSUNG ELECTRONICS CO LTD1 citations51