Inventor
RYU JAE-JUN
KR3 patents
Patents
3 patentsUS6883248B2Apr 26, 2005
Apparatus for drying a substrate using an isopropyl alcohol vapor
SAMSUNG ELECTRONICS CO LTD26 citations90
US5856623AJan 5, 1999
Particle counter with sampling probe having adjustable intake area
SAMSUNG ELECTRONICS CO LTD20 citations87
US7081182B2Jul 25, 2006
Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing process
SAMSUNG ELECTRONICS CO LTD5 citations58