Inventor

YI HUN-JUNG

KR17 patents

⚠️ This page may combine multiple inventors who share the name “YI HUN-JUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YI HUN-JUNG

SAMSUNG ELECTRONICS CO LTD

Apparatus to dry substrates

Apparatus for drying a substrate using an isopropyl alcohol vapor

Laser cleaning of backside of wafer for photolithographic processing

Etching solution for silicon oxide method of manufacturing a semiconductor device using the same

Wafer guides for processing semiconductor substrates

Semiconductor substrate cleaning methods, and methods of manufacture using same

Method and apparatus for drying a wafer, and an apparatus for cleaning and drying a wafer

Apparatus and method for analyzing contaminants on wafer

System and method for drying semiconductor substrate

Wafer guides for processing semiconductor substrates

Apparatus for manufacturing integrated circuit device

Semiconductor wet etchant and method of forming interconnection structure using the same

Apparatus for purifying air and purifying method thereof

Apparatus and method for drying semiconductor substrates

KOREA MACH & MATERIALS INST

Method for treating toxic compounds-containing gas by non-thermal plasma

SAMSUNG DISPLAY CO LTD

Apparatus for detecting organic compounds and apparatus for manufacturing display device using the same

KIM SE-YEON

Plasma monitoring device using a cylindrical hollow electrode