Inventor
KAMPHERBEEK BERT JAN
NL9 patents
⚠️ This page may combine multiple inventors who share the name “KAMPHERBEEK BERT JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MAPPER LITHOGRAPHY IP BV
4 patentsUS6897458B2May 24, 2005
Electron beam exposure system
MAPPER LITHOGRAPHY IP BV144 citations97
US7091504B2Aug 15, 2006
Electron beam exposure system
MAPPER LITHOGRAPHY IP BV50 citations94
US8890094B2Nov 18, 2014
Projection lens arrangement
MAPPER LITHOGRAPHY IP BV6 citations73
US6844560B2Jan 18, 2005
Lithography system comprising a converter plate and means for protecting the converter plate
MAPPER LITHOGRAPHY IP BV10 citations73