Inventor
TSENG HSING-HUANG
US20 patents
⚠️ This page may combine multiple inventors who share the name “TSENG HSING-HUANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
18 patentsUS6063698AMay 16, 2000
Method for manufacturing a high dielectric constant gate oxide for use in semiconductor integrated circuits
MOTOROLA INC231 citations99
US5972804AOct 26, 1999
Process for forming a semiconductor device
MOTOROLA INC181 citations98
US5960289ASep 28, 1999
Method for making a dual-thickness gate oxide layer using a nitride/oxide composite region
MOTOROLA INC251 citations98
US5712208AJan 27, 1998
Methods of formation of semiconductor composite gate dielectric having multiple incorporated atomic dopants
MOTOROLA INC95 citations98
US5552332ASep 3, 1996
Process for fabricating a MOSFET device having reduced reverse short channel effects
MOTOROLA INC160 citations98
US5464792ANov 7, 1995
Process to incorporate nitrogen at an interface of a dielectric layer in a semiconductor device
MOTOROLA INC122 citations98
US6297173B1Oct 2, 2001
Process for forming a semiconductor device
MOTOROLA INC52 citations96
US5726087AMar 10, 1998
Method of formation of semiconductor gate dielectric
MOTOROLA INC89 citations96
US5571734ANov 5, 1996
Method for forming a fluorinated nitrogen containing dielectric
MOTOROLA INC71 citations96
US5436488AJul 25, 1995
Trench isolator structure in an integrated circuit
MOTOROLA INC60 citations96
US5387540AFeb 7, 1995
Method of forming trench isolation structure in an integrated circuit
MOTOROLA INC105 citations96
US5371026ADec 6, 1994
Method for fabricating paired MOS transistors having a current-gain differential
MOTOROLA INC85 citations96
US5580815ADec 3, 1996
Process for forming field isolation and a structure over a semiconductor substrate
MOTOROLA INC74 citations93
US5830802ANov 3, 1998
Process for reducing halogen concentration in a material layer during semiconductor device fabrication
MOTOROLA INC32 citations92
US5707889AJan 13, 1998
Process for forming field isolation
MOTOROLA INC21 citations91
US5731238AMar 24, 1998
Integrated circuit having a jet vapor deposition silicon nitride film and method of making the same
MOTOROLA INC52 citations89
US6146948ANov 14, 2000
Method for manufacturing a thin oxide for use in semiconductor integrated circuits
MOTOROLA INC42 citations86
US5712177AJan 27, 1998
Method for forming a reverse dielectric stack
MOTOROLA INC18 citations83