Inventor
EFFERENN DIRK
DE7 patents
⚠️ This page may combine multiple inventors who share the name “EFFERENN DIRK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
6 patentsUS7261829B2Aug 28, 2007
Method for masking a recess in a structure having a high aspect ratio
INFINEON TECHNOLOGIES AG4 citations60
US6770530B2Aug 3, 2004
Method for producing a shallow trench isolation for n- and p-channel field-effect transistors in a semiconductor module
INFINEON TECHNOLOGIES AG6 citations60
US6964912B2Nov 15, 2005
Method for fabricating a semiconductor structure
INFINEON TECHNOLOGIES AG1 citations50
US7413993B2Aug 19, 2008
Process for removing a residue from a metal structure on a semiconductor substrate
INFINEON TECHNOLOGIES AG1 citations44
US7125778B2Oct 24, 2006
Method for fabricating a self-aligning mask
INFINEON TECHNOLOGIES AG0 citations39
US6716720B2Apr 6, 2004
Method for filling depressions on a semiconductor wafer
INFINEON TECHNOLOGIES AG0 citations39