Inventor
CAMPBELL PHILIP L
US8 patents
⚠️ This page may combine multiple inventors who share the name “CAMPBELL PHILIP L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
7 patentsUS7677180B2Mar 16, 2010
Apparatus and method for steering transport vehicles in semiconductor processing
IBM9 citations82
US7591624B2Sep 22, 2009
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
IBM8 citations82
US7887277B2Feb 15, 2011
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
IBM6 citations72
US7992734B2Aug 9, 2011
Semiconductor automation buffer storage identification system and method
IBM5 citations55
US7103458B2Sep 5, 2006
Automation system using wireless high frequency
IBM0 citations50
US7720956B2May 18, 2010
Method, system, and storage medium for providing continuous communication between process equipment and an automated material handling system
IBM1 citations48
US7426555B2Sep 16, 2008
Method, system, and storage medium for providing continuous communication between process equipment and an automated material handling system
IBM1 citations48