Inventor
BRAINARD DAVID
US5 patents
Patents
5 patentsUS6596093B2Jul 22, 2003
Methods for cleaning microelectronic structures with cyclical phase modulation
MICELL TECHNOLOGIES INC75 citations97
US6782900B2Aug 31, 2004
Methods and apparatus for cleaning and/or treating a substrate using CO2
MICELL TECHNOLOGIES INC20 citations91
US7141496B2Nov 28, 2006
Method of treating microelectronic substrates
MICELL TECHNOLOGIES INC7 citations73
US6989172B2Jan 24, 2006
Method of coating microelectronic substrates
MICELL TECHNOLOGIES INC10 citations73
US7592035B2Sep 22, 2009
Method of coating microelectronic substrates
MICELL TECHNOLOGIES INC0 citations51