Inventor
KIM KWANG-NAM
KR25 patents
⚠️ This page may combine multiple inventors who share the name “KIM KWANG-NAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS11037766B2Jun 15, 2021
Substrate support apparatus and plasma processing apparatus having the same
SAMSUNG ELECTRONICS CO LTD3 citations72
US11501987B2Nov 15, 2022
Loadlock module and semiconductor manufacturing apparatus including the same
SAMSUNG ELECTRONICS CO LTD3 citations71
US10971382B2Apr 6, 2021
Loadlock module and semiconductor manufacturing apparatus including the same
SAMSUNG ELECTRONICS CO LTD2 citations71
US11837496B2Dec 5, 2023
Substrate processing apparatus and method of processing a substrate
SAMSUNG ELECTRONICS CO LTD0 citations60
US11018046B2May 25, 2021
Substrate processing apparatus including edge ring
SAMSUNG ELECTRONICS CO LTD1 citations60
US11289309B2Mar 29, 2022
Device for providing gas to a plasma chamber and a plasma processing device including the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US10062550B2Aug 28, 2018
Substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations49
JEONG BEUNG-HWA
5 patentsUS8319234B2Nov 27, 2012
Organic light emitting diode display having a multi-color pixel including a hydrophobic layer
JEONG BEUNG-HWA7 citations80
US8940101B2Jan 27, 2015
Apparatus for cleaning substrate
JEONG BEUNG-HWA6 citations72
US8681107B2Mar 25, 2014
Organic light emitting display apparatus and method of manufacturing the same
JEONG BEUNG-HWA3 citations60
US8501532B2Aug 6, 2013
Method of fabricating organic light emitting diode display
JEONG BEUNG-HWA4 citations59
US9199285B2Dec 1, 2015
System and method for cleaning substrate
JEONG BEUNG-HWA0 citations40
LG PHILIPS LCD CO LTD
4 patentsUS6337292B1Jan 8, 2002
Method of forming silicon oxide layer and method of manufacturing thin film transistor thereby
LG PHILIPS LCD CO LTD55 citations96
US7378304B2May 27, 2008
Method of forming silicon oxide layer and method of manufacturing thin film transistor thereby
LG PHILIPS LCD CO LTD4 citations74
US6716752B2Apr 6, 2004
Method of forming silicon oxide layer and method of manufacturing thin film transistor thereby
LG PHILIPS LCD CO LTD2 citations63
US6627545B2Sep 30, 2003
Method of forming silicon oxide layer and method of manufacturing thin film transistor thereby
LG PHILIPS LCD CO LTD0 citations52
AHN JI-SU
3 patentsUS8420513B2Apr 16, 2013
Method of fabricating thin film transistor
AHN JI-SU2 citations61
US8158984B2Apr 17, 2012
Thin film transistor, method of fabricating the same, and organic light emitting diode display device including the same
AHN JI-SU1 citations51
US8519405B2Aug 27, 2013
Thin film transistor, organic light emitting diode (OLED) display including the same, and manufacturing methods of them
AHN JI-SU0 citations48