Inventor

GREGOR MARIUSCH

US21 patents

⚠️ This page may combine multiple inventors who share the name “GREGOR MARIUSCH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GREGOR MARIUSCH

LAM RES CORP

Active showerhead

Active showerhead

Systems and methods for pulse width modulated dose control

Systems and methods for pulse width modulated dose control

Systems and methods for pulse width modulated dose control

Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment

Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment

Turbomolecular pump and cathode assembly for etching reactor

APPLIED MATERIALS INC

Apparatus and method for regulating a pressure in a chamber

Pump power consumption enhancement

Method and apparatus for dampening pressure fluctuations in a fluid delivery system

Compact device for enhancing the mixing of gaseous species

Method and system for controlling a flow ratio controller using feedback

Method and system for controlling a flow ratio controller using feed-forward adjustment

GREGOR MARIUSCH

N-channel flow ratio controller calibration

Real time lead-line characterization for MFC flow verification

N-channel flow ratio controller calibration

Methods and apparatus for enhanced gas flow rate control

(unassigned)

Electromagnetically levitated substrate support

PORTHOUSE KEITH BRIAN

Methods and apparatus for processing substrates using model-based control

CRUSE JAMES P

Methods and apparatus for calibrating flow controllers in substrate processing systems