Inventor

SANDHU GURTEJ SINGH

US93 patents

⚠️ This page may combine multiple inventors who share the name “SANDHU GURTEJ SINGH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SANDHU GURTEJ SINGH

MICRON TECHNOLOGY INC

Atomic layer deposition and conversion

Enhanced atomic layer deposition

Conductive container structures having a dielectric cap

Method and apparatus for detecting the endpoint in chemical-mechanical polishing of semiconductor wafers

Method and apparatus for detecting the endpoint in chemical-mechanical polishing of semiconductor wafers

Method and apparatus for selectively conditioning a polished pad used in planarizng substrates

Method and apparatus for detecting the endpoint in chemical-mechanical polishing of semiconductor wafers

Endpoint detector and method for measuring a change in wafer thickness in chemical-mechanical polishing of semiconductor wafers

Method and apparatus for detecting the endpoint in chemical-mechanical polishing of semiconductor wafers

Apparatus and method for planar end-point detection during chemical-mechanical polishing

Waveguide for thermo optic device

Enhanced atomic layer deposition

Resonator for thermo optic device

Waveguide for thermo optic device

Structures and methods for enhancing capacitors in integrated circuits

Use of DAR coating to modulate the efficiency of laser fuse blows

Surface treatment of DARC films to reduce defects in subsequent cap layers

Chemical vapor deposition of titanium

Endpoint detector and method for measuring a change in wafer thickness in chemical-mechanical polishing of semiconductor wafers

Method to achieve rough silicon surface on both sides of container for enhanced capacitance/area electrodes

Slurry with chelating agent for chemical-mechanical polishing of a semiconductor wafer and methods related thereto

Method of forming titanium silicide and titanium by chemical vapor deposition

Endpoint detector and method for measuring a change in wafer thickness in chemical-mechanical polishing of semiconductor wafers

Method for fabricating stacked layer silicon nitride for low leakage and high capacitance

Semiconductor wafer for improved chemical-mechanical polishing over large area features

Slurry with chelating agent for chemical-mechanical polishing of a semiconductor wafer and methods related thereto

Resistive heater for thermo optic device

Atomic layer deposition and conversion

Resistive heater for thermo optic device

Resonator for thermo optic device

Resistive heater for thermo optic device

Resistive heater for thermo optic device

Structures and methods for enhancing capacitors in integrated circuits

Dopant barrier for doped glass in memory devices

Method of forming titanium silicide and titanium by chemical vapor deposition and resulting apparatus

Methods of forming a contact having titanium silicide and titanium formed by chemical vapor deposition

Container capacitor with increased surface area and method for making same

Apparatus having titanium silicide and titanium formed by chemical vapor deposition

Chemical vapor deposition of titanium

Memory device with improved domed capacitors

Capacitive memory cell

Highly efficient transistor for fast programming of flash memories

Highly efficient transistor for fast programming of flash memories

Method for making a container capacitor with increased surface area

Waveguide for thermo optic device

Waveguide for thermo optic device

Memory cell with tight coupling

SANDHU GURTEJ SINGH

Resonator for thermo optic device

Resonator for thermo optic device

MICRON TECHNOLOGIES INC

Barrier layer cladding around copper interconnect lines