Inventor
OYAMA KATSUHIKO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “OYAMA KATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
6 patentsUS7205670B2Apr 17, 2007
Semiconductor device and manufacturing method therefor
TOSHIBA KK61 citations97
US5677246AOct 14, 1997
Method of manufacturing semiconductor devices
TOSHIBA KK38 citations90
US6429372B1Aug 6, 2002
Semiconductor device of surface mounting type and method for fabricating the same
TOSHIBA KK26 citations88
US6861738B2Mar 1, 2005
Laminated-chip semiconductor device
TOSHIBA KK3 citations62
US6617678B2Sep 9, 2003
Semiconductor device
TOSHIBA KK6 citations62
US9202768B2Dec 1, 2015
Semiconductor module
TOSHIBA KK0 citations52
TOKYO ELECTRON LTD
6 patentsUS7073999B2Jul 11, 2006
Receiving container body for object to be processed
TOKYO ELECTRON LTD22 citations92
US9406537B2Aug 2, 2016
Cover opening/closing apparatus, thermal processing apparatus using the same, and cover opening/closing method
TOKYO ELECTRON LTD18 citations84
US10096504B2Oct 9, 2018
Method for managing atmosphere in storage container
TOKYO ELECTRON LTD5 citations71
US7905700B2Mar 15, 2011
Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus
TOKYO ELECTRON LTD4 citations61
US10428425B2Oct 1, 2019
Film deposition apparatus, method of depositing film, and non-transitory computer-readable recording medium
TOKYO ELECTRON LTD0 citations41
US9679794B2Jun 13, 2017
Spacer, spacer transferring method, processing method and processing apparatus
TOKYO ELECTRON LTD0 citations41
OYAMA KATSUHIKO
2 patentsUS9136152B2Sep 15, 2015
Substrate transport apparatus, substrate transport method, and recording medium
OYAMA KATSUHIKO0 citations36
US9048273B2Jun 2, 2015
Substrate conveying container opening/closing device, lid opening/closing device and semiconductor manufacturing apparatus
OYAMA KATSUHIKO0 citations36